Spectral Range UV (190 - 400 nm)

Phasics SID4-UV wavefront sensor

Bringing high-resolution wavefront sensing as low as 250 nm, the SID4-UV is perfectly suited for UV optics testing, UV laser characterization (used in lithography or semiconductor applications), and surface inspection of lenses and wafers.

Key Features

  • Very high resolution – 250×250 sampling
  • High sensitivity – 2 nm RMS
  • Affordable solution for UV wavefront measurement


Laser testing, adaptive optics, and plasma diagnostics Optics metrology and optical system alignment


Wavelength range 250 - 400 nm
Aperture dimension 7.4 x 7.4 mm²
Spatial resolution 29.6 µm
Phase and Intensity sampling 250 x 250
Resolution (Phase) 2 nm RMS
Accuracy (Absolute) 10 nm RMS
Acquisition rate 30 fps
Real-time processing frequency* > 2 fps (full resolution)*
Interface Giga Ethernet
Dimensions (WxHxL) 78 x 88.1 x 71.1 mm³
Weight ~575g

*with SID4 Software


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