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SID4 UV
Spectral Range UV (190 - 400 nm)
Bringing high-resolution wavefront sensing as low as 190 nm, the SID4 UV is perfectly suited for UV optics testing, UV laser characterization (used in lithography or semiconductor applications), and surface inspection of lenses and wafers.
Key features
- Very high resolution – 300 × 300 sampling
- High sensitivity – 2 nm RMS
- Affordable solution for UV wavefront measurement
Specifications
| Wavelength range | 190 - 400 nm |
| Aperture dimension | 7.8 x 7.8 mm² |
| Spatial resolution | 26 µm |
| Phase and Intensity sampling | 300 x 300 |
| Resolution (Phase) | 2 nm RMS |
| Accuracy (Absolute) | 15 nm RMS |
| Acquisition rate | > 15 fps |
| Real-time processing frequency* | 2 fps (full resolution)* |
| Interface | Giga Ethernet |
| Dimensions (WxHxL) | 74 x 71 x 91 mm³ |
| Weight | ~600g |
*with PhaseStudio Software
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