Spectral Range UV (190 - 400 nm)

Phasics SID4 UV wavefront sensor

Bringing high-resolution wavefront sensing as low as 190 nm, the SID4 UV is perfectly suited for UV optics testing, UV laser characterization (used in lithography or semiconductor applications), and surface inspection of lenses and wafers.

Key Features

  • Very high resolution – 300 × 300 sampling
  • High sensitivity – 2 nm RMS
  • Affordable solution for UV wavefront measurement


Laser testing, adaptive optics, and plasma diagnostics Optics metrology and optical system alignment


Wavelength range 190 - 400 nm
Aperture dimension 7.8 x 7.8 mm²
Spatial resolution 26 µm
Phase and Intensity sampling 300 x 300
Resolution (Phase) 2 nm RMS
Accuracy (Absolute) 20 nm RMS
Acquisition rate > 30 fps
Real-time processing frequency* 2 fps (full resolution)*
Interface Giga Ethernet
Dimensions (WxHxL) 45 x 30 x 100 mm³
Weight ~ 250g

*with PhaseStudio Software


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