Based on Phasics' patented technology, the SID4 UV-HR wavefront sensor offers both an unrivalled high resolution (355x280 measurement points) and a very high sensitivity (1 nm RMS) in the ultraviolet spectrum from 190 nm to 400 nm. Consequently, the SID4 UV-HR is perfectly adapted for optical component characterization (used in lithography, semiconductors…) and surface inspection (lens and wafers...).
• Laser testing, adaptive optics, and plasma diagnostics • Optics metrology and optical system alignment •
Wavelength range | 190 - 400 nm |
Aperture dimension | 13.8 x 10.88 mm² |
Spatial resolution | 40 µm |
Phase and intensity sampling | 355 x 280 |
Resolution (Phase) | 1 nm RMS |
Accuracy (Absolute) | 10 nm RMS |
Acquisition rate | 30 fps |
Real-time processing frequency* | > 3 fps (full resolution)* |
Interface | CameraLink |
Dimensions (WxHxL) | 51 x 51.1 x 76 mm³ |
Weight | ~300g |
*with SID4 software
• Laser industry • Optical components & assemblies • AR/VR • Astronomy • Aerospace • Semiconductor •