SID4-UV-HR
Spectral Range UV (190 - 400 nm)
Based on Phasics' patented technology, the SID4 UV-HR wavefront sensor offers both an unrivalled high resolution (355x280 measurement points) and a very high sensitivity (1 nm RMS) in the ultraviolet spectrum from 190 nm to 400 nm. Consequently, the SID4 UV-HR is perfectly adapted for optical component characterization (used in lithography, semiconductors…) and surface inspection (lens and wafers...).
Key Features
- Sensitive down to 190 nm
- High sensitivity – 1 nm RMS
- Very high resolution (355 x 280 sampling)
Applications
• Laser testing, adaptive optics, and plasma diagnostics • Optics metrology and optical system alignment •
Specifications
SID4-UV-HR
| Wavelength range | 190 - 400 nm |
| Aperture dimension | 13.8 x 10.88 mm² |
| Spatial resolution | 40 µm |
| Phase and intensity sampling | 355 x 280 |
| Resolution (Phase) | 1 nm RMS |
| Accuracy (Absolute) | 10 nm RMS |
| Acquisition rate | 30 fps |
| Real-time processing frequency* | > 3 fps (full resolution)* |
| Interface | CameraLink |
| Dimensions (WxHxL) | 51 x 51.1 x 76 mm³ |
| Weight | ~300g |
*with SID4 software
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Related Markets
• Laser industry • Optical components & assemblies • AR/VR • Astronomy • Aerospace • Semiconductor •