Spectral Range UV (190 - 400 nm)

Phasics SID4-UV-HR wavefront sensor

Based on Phasics' patented technology, the SID4 UV-HR wavefront sensor offers both an unrivalled high resolution (355x280 measurement points) and a very high sensitivity (1 nm RMS) in the ultraviolet spectrum from 190 nm to 400 nm. Consequently, the SID4 UV-HR is perfectly adapted for optical component characterization (used in lithography, semiconductors…) and surface inspection (lens and wafers...).

Key Features

  • Sensitive down to 190 nm
  • High sensitivity – 1 nm RMS
  • Very high resolution (355 x 280 sampling)


Laser testing, adaptive optics, and plasma diagnostics Optics metrology and optical system alignment



Wavelength range 190 - 400 nm
Aperture dimension 13.8 x 10.88 mm²
Spatial resolution 38.88 µm
Phase and intensity sampling 355 x 280
Resolution (Phase) 1 nm RMS
Accuracy (Absolute) 10 nm RMS
Acquisition rate 30 fps
Real-time processing frequency* > 3 fps (full resolution)*
Interface CameraLink
Dimensions (WxHxL) 78 x 88.1 x 70.8 mm³
Weight ~900g

*with SID4 software


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